| 氮化铝压电微机电系统轮廓模式谐振器技术及应用 |
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| 引用本文： | 俞燕,王璐烽,丁芩华,何杰.氮化铝压电微机电系统轮廓模式谐振器技术及应用[J].压电与声光,2022,44(4):667-672. |
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| 作者姓名： | 俞燕 王璐烽 丁芩华 何杰 |
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| 作者单位： | 重庆工业职业技术学院,重庆 401120;苏州中材非金属矿工业设计研究院有限公司,江苏 苏州 215004;中国电子科技集团公司 第二十六研究所,重庆 400060 |
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| 摘 要： | 压电微机电系统(MEMS)为各种高性能滤波器、振荡器和传感器等提供了一个多功能平台。氮化铝 (AlN)MEMS轮廓模谐振器(CMR)具有工作频率跨度大，品质因数高，体积小及能在单个芯片上集成多频器件且与集成电路(IC)技术兼容等优点，具有较好的应用前景。该文对 AlN MEMSCMR 的原理与典型结构、制备工艺及应用进行了综合性阐述，并分析了 CMR技术未来的发展方向。
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| 关 键 词： | 压电微机电系统 氮化铝 轮廓模式谐振器 滤波器 振荡器 射频前端模块 |
AlN Piezoelectric MEMS CMR Technology and Application |
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| Yu Yan,Wang Lufeng,Ding Qinhu,He Jie.AlN Piezoelectric MEMS CMR Technology and Application[J].Piezoelectrics & Acoustooptics,2022,44(4):667-672. |
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| Authors: | Yu Yan Wang Lufeng Ding Qinhu He Jie |
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| Affiliation: | Chongqing Industry Polytechnic College,Chongqing 401120 ,China;Suzhou SINOMA Design and Research Institute of Non-metallic Minerals Industy Co.,Ltd.,Suzhou 215004 ,China; The 2 6.th Institute of China Electronics Technology Group Corporation, Chongqing 400060 , China |
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| Abstract: | The piezoelectric microelectromechanical system(MEMS) provides a versatile platform for various high-performance filters, oscillators and sensors, etc.. The aluminum nitride (AlN) MEMS contour mode resonator (CMR) has the advantages of large operating frequency span, high quality factor, small size, ability to integrate multi-frequency devices on a single chip and compatible with integrated circuit(IC) technology, etc., and has good prospects for application. In this paper, the principle, typical structure, fabrication process and applications of AlN MEMS CMR are comprehensively overviewed, and the future developments of CMR technology are analyzed. |
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