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| 环境气氛及气压对增透膜真空激光损伤的影响 | |
| 引用本文： | 凌秀兰,李大伟,赵元安,李淑红,邵建达,范正修.环境气氛及气压对增透膜真空激光损伤的影响[J].中国激光,2009,36(11). |
| 作者姓名： | 凌秀兰 李大伟 赵元安 李淑红 邵建达 范正修 |
| 作者单位： | 1. 中国科学院上海光学精密机械研究所光学薄膜技术研究与发展中心,上海201800;中国科学院研究生院,北京100039;中北大学信息与通信工程学院,山西太原030051 2. 中国科学院上海光学精密机械研究所光学薄膜技术研究与发展中心,上海,201800 3. 中国科学院上海光学精密机械研究所光学薄膜技术研究与发展中心,上海201800;中国科学院研究生院,北京100039 |
| 摘 要： | 利用1-on-1损伤测试方法,测试了真空和空气、氧气、氮气、氦气环境下在波长为1064 nm处增透膜(ARF)的激光损伤阈值和损伤形貌.结果表明,真空环境下的损伤阈值明显低于大气环境下的损伤阈值,真空环境下的破斑形貌也与大气环境下的破斑形貌有显著差异.在真空环境下存入一定量的氧气、氮气和氦气后薄膜的损伤阈值都得到提高,但存入的气体的种类及气压不同,损伤阈值与破斑形貌也不尽相同. |
| 关 键 词： | 薄膜 增透膜 环境气氛 激光损伤阈值 损伤形貌 |
Effects of Environments and Gas Pressures on Laser-Induced Damage of Anti-Reflection Films |
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| Ling Xiulan,Li Dawei,Zhao Yuan'an,Li Shuhong,Shao Jianda,Fan Zhengxiu.Effects of Environments and Gas Pressures on Laser-Induced Damage of Anti-Reflection Films[J].Chinese Journal of Lasers,2009,36(11). | |
| Authors: | Ling Xiulan Li Dawei Zhao Yuan'an Li Shuhong Shao Jianda Fan Zhengxiu |
| Abstract: | Laser damage threshold and damage morpbology at the wavelength of 1064 nm are tested in vacuum,air,O2,N2,He2 environments by using 1-on-1 testing method.The results show that compared to normal atmospheric conditions,anti-reflection films(ARF)have a decreasing laser induced damage threshold under vacuum environments.The morphology of the damaged sites showed a particular difference under two conditions.In vacuum environment witll a few O2,N2,He2,laser induced damage threshold of anti-reflection films increased.Different gas environments and gas pressure result in different laser induced damage thresholds and damage morphology. |
| Keywords: | 1-on-1 thin films anti-reflection films 1-on-1 environments and gas pressurest laser-induced damagethreshoid damage morphology |
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