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| 共面波导传输线电容准确测量及不确定度分析 | |
| 引用本文： | 栾鹏,王一帮,梁法国,杨保国.共面波导传输线电容准确测量及不确定度分析[J].计量学报,2018,39(2):272-275. |
| 作者姓名： | 栾鹏 王一帮 梁法国 杨保国 |
| 作者单位： | 1.中国电子科技集团公司 第十三研究所, 河北 石家庄 050051 2.中国电子科技集团公司 第四十一研究所, 山东 青岛 266555 |
| 摘 要： | 介绍了低介质损耗共面波导(CPW)传输线电容测量方法中的反射系数测量及线电容外推测量技术,成功提取了商用校准基片101-190C上传输线的线电容。根据线电容算法模型,以校准件及矢网内部接收机动态幅相精度不理想作为误差来源,采用蒙特卡罗仿真对线电容测量结果的不确定度进行了评定。最后将线电容用于多线TRL校准,与NIST标定结果更接近,在40 GHz频率范围内,反射系数模值相差小于±0.02, 传输幅度模值相差小于±0.05 dB, 传输相位相差小于±1°。 |
| 关 键 词： | 计量学 传输线电容 共面波导 在片 特性阻抗 不确定度 |
| 收稿时间： | 2017-10-27 |
Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis |
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| LUAN Peng,WANG Yi-bang,LIANG Fa-guo,YANG Bao-guo.Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis[J].Acta Metrologica Sinica,2018,39(2):272-275. | |
| Authors: | LUAN Peng WANG Yi-bang LIANG Fa-guo YANG Bao-guo |
| Affiliation: | 1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,China 2. The 41th Research Institute of China Electronics Technology Group Corporation, Qingdao, Shandong 266555, China |
| Abstract: | An accurate method is used to determine the coplanar waveguide (CPW) transmission line capacitance of commercial alumina substrate 101-190C （CASCADE）, which involves the measurement of transmission lines reflect and extrapolation technique. An MCM method is used to evaluate the uncertainty of transmission line capacitance measurement, which involves calibration kit and dynamic accuracy of magnitude and phase. Finally, the transmission line capacitance is used in the multiline TRL calibration, the result is very contiguous with NIST. Compared with NIST, the results show that the error of the magnitude of reflection is within ±0.02, the error of the transmission magnitude is within ±0.05 dB, and the error of the transmission phase is within ±1° above 40 GHz. |
| Keywords: | metrology transmission line capacitance coplanar waveguide on-wafer characteristic impedance uncertainty |
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