双T型MEMS仿生矢量水听器的设计与测试

根据当前声纳系统的需求，以MEMS技术为依托，结合仿生原理、压阻原理，提出了一种双T型矢量水听器。在分析T型梁结构力学特性的基础上，详细介绍了两种不同尺寸微结构的设计、加工和测试。采用ANSYS软件仿真，得出两种微结构的谐振频率分别为1993.3Hz和10.17KHz；利用MEMS加工工艺加工出水听器微结构并对水听器进行了封装；采用振动台标定和水下驻波场测试相结合的方法完成了水听器的测试。测试结果表明两种结构的双“T”型矢量水听器灵敏度达到-180dB 和 -192dB (1kHz，0dB参考值1V/μPa)，具有良好的“8”指向性，矢量特性明显，动态范围为90.48dB(315Hz)。

Design and test for a double T-shape MEMS bionic vector hydrophone

In view of the Sonar System demand, a novel double T-shape vector hydrophone was proposed by means of the piezoresistive effect, bionic principle and MEMS technology. Based on the mechanical properties analysis of the T-shape beam, the design, simulation, fabrication and test of the double T-shaped vector hydrophone with two different sizes were described. The microstructure of the hydrophone was statically simulated by ANSYS, and the first-order resonance frequencies of the two microstructures were 1993.3Hz and 10.17 kHz respectively; The microstructure of the hydrophone was manufactured by MEMS technology and was encapsulated; The hydrophone was measured by vibrating table and underwater standing wave field. The test results show that the receiving sensitivity is up to -180dB and -192dB at 1 kHz (0dB 1V/μPa), dynamic range is 90.48 dB and the vector hydrophone possesses good “8” directional pattern.