| 低介低损耗CaO-B_2O_3-SiO_2系微晶玻璃性能研究 |
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| 引用本文： | 李宝剑,张树人,周晓华,路标,何茗.低介低损耗CaO-B_2O_3-SiO_2系微晶玻璃性能研究[J].电子元件与材料,2009,28(12). |
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| 作者姓名： | 李宝剑 张树人 周晓华 路标 何茗 |
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| 作者单位： | 电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054 |
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| 基金项目： | "十一五"装备预研规划子题项目资助 |
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| 摘 要： | 采用高温熔融–水淬法制备了CaO-B2O3-SiO2系微晶玻璃。通过烧结点实验仪、梯温炉、DTA、XRD对其烧结性能、析晶性能、致密性及介电性能进行了研究。结果表明:可应用于LTCC基板材料的微晶玻璃组成为:x(SiO2)为18.0%、x(CaO)为36.8%、x(B2O3)为45.2%;该微晶玻璃在723℃附近开始软化,771℃析出硼钙石晶体;经850℃烧结1h后得到的微晶玻璃样品具有良好的介电性能(1MHz):εr为4.67,tanδ为0.71×10–3。
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| 关 键 词： | 氧化钙-氧化硼-氧化硅 微晶玻璃 低温共烧陶瓷 低介电常数 析晶 |
Study on properties of low permittivity and dielectric loss CaO-B_2O_3-SiO_2 system glass-ceramics for LTCC |
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| LI Baojian,ZHANG Shuren,ZHOU Xiaohua,LU Biao,HE Ming.Study on properties of low permittivity and dielectric loss CaO-B_2O_3-SiO_2 system glass-ceramics for LTCC[J].Electronic Components & Materials,2009,28(12). |
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| Authors: | LI Baojian ZHANG Shuren ZHOU Xiaohua LU Biao HE Ming |
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| Abstract: | CaO-B_2O_3-SiO_2(CBS)system glass-ceramics were synthesized by high temperature melting and water-quenching methods.Sintering point tester,gradient temperature furnace,DTA and XRD were used to research the sintering properties,crystallization properties,compactness and dielectric properties of CBS system glass-ceramics.Studies show that the composition of CBS glass-ceramic which can be applied to LTCC subatrate materials is as follows: SiO_2 18.0%,CaO 36.8%,B_2O_3 45.2% (mole fraction);it begins to soften around 723 ℃ and precipitate borocalcite crystals at 771 ℃;the CBS glass-ceramic sample sintered at 850 ℃ for 1 h possesses good dielectric properties with relative permittivity of 4.67 and dielectric loss of 0.71×10~(-3) at 1 MHz. |
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| Keywords: | CaO-B_2O_3-SiO_2 glass-ceramic LTCC low permittivity crystallization |
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