微流控分析芯片的加工技术

综述了微流控分析芯片和加工技术和材质性能，光刻和蚀刻技术常用于加工硅，玻璃和石英芯片。有机聚合物由于品种多，易加工，是代替玻璃和石英的芯片材料。本文总结和讨论了各种芯片材料和它们的加工方法，如光刻，湿法刻蚀，干法刻蚀，模塑法，软刻蚀，热压法，激光切蚀法，LIGA技术和键合技术，引用文献36篇。

Microfabrication Techniques for Production of Microfluidic Chips

This review gives a brief introduction to microfabrication techniques and substrate materials for production of microfluidic chips. Photolithography combined with etching technique is the most commonly used technique for fabrication of silicon, glass and quartz microfluidic chips. As alternatives, organic polymers are more versatile and easier to machine than glass and quartz. Different materials and their micromachining techniques such as lithography,wet etching, dry etching, cast molding, soft lithography, imprinting, laser ablation, LIGA and bonding technique for fabricating microfluidic chips are summarized and discussed. 36 references are cited.