| 静压气浮平台质量流量的计算 |
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| 引用本文： | 张昊,卢荣胜. 静压气浮平台质量流量的计算[J]. 液压气动与密封, 2011, 31(10) |
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| 作者姓名： | 张昊 卢荣胜 |
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| 作者单位： | 合肥工业大学仪器科学与光电工程学院,安徽合肥,230009 |
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| 基金项目： | 国家863项目资助内容(编号2009AA04Z114) |
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| 摘 要： | 质量流量是静压气浮平台的一个重要性能参数。本文采用数值计算和有限体积法对静压气浮平台的质量流量进行了计算并对比分析。结果表明通过两种方法得到的质量流量变化趋势相同,均随着供气压力的增加而增大,且当供气压力增加时,两计算结果趋于一致。其中有限体积法考虑了更多实际因素的影响,所得结果更贴近真实情况。
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| 关 键 词： | 静压气浮平台 质量流量 解析法 有限体积法 |
Mass Flow Computation of An Air Bearing Table |
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| ZHANG Hao,LU Rong-sheng. Mass Flow Computation of An Air Bearing Table[J]. Hydraulics Pneumatics & Seals, 2011, 31(10) |
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| Authors: | ZHANG Hao LU Rong-sheng |
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| Affiliation: | ZHANG Hao LU Rong-sheng(College of Instrumentation and Opto-electronics Engineering,Hefei University of Technology,Hefei 230009,China) |
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| Abstract: | The mass flow of an air bearing table is an important parameter to measure the bearing property.In the paper,its computation based on analytic method and finite volume method is investigated.The research result shows that the mass flow of the air bearing table increases with the increase of supply pneumatic pressure from air source.The variation tendency of the mass flow calculated by the two methods is the same,which become more consistent with the augment of pneumatic pressure.However,the finite volume me... |
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| Keywords: | air bearing table mass flow analytic method finite volume method |
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