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深亚微米CMOS反相器的单粒子瞬态效应研究
引用本文:高成,张芮,王怡豪,黄姣英.深亚微米CMOS反相器的单粒子瞬态效应研究[J].微电子学,2019,49(5):729-734.
作者姓名:高成  张芮  王怡豪  黄姣英
作者单位:北京航空航天大学 可靠性与系统工程学院, 北京 100191,北京航空航天大学 可靠性与系统工程学院, 北京 100191,北京航空航天大学 可靠性与系统工程学院, 北京 100191,北京航空航天大学 可靠性与系统工程学院, 北京 100191
基金项目:十三五计划微电子预研项目(6140002010202)
摘    要:针对小尺寸CMOS反相器的单粒子瞬态效应,分别采用单粒子效应仿真和脉冲激光模拟试验两种方式进行研究。选取一种CMOS双反相器作为研究对象,确定器件的关键尺寸,并进行二维建模,完成器件的单粒子瞬态效应仿真,得到单粒子瞬态效应的阈值范围。同时,开展脉冲激光模拟单粒子瞬态效应试验,定位该器件单粒子瞬态效应的敏感区域,捕捉不同辐照能量下器件产生的单粒子瞬态脉冲,确定单粒子瞬态效应的阈值范围,并与仿真结果进行对比分析。

关 键 词:CMOS反相器    单粒子瞬态效应    TCAD仿真    脉冲激光试验
收稿时间:2018/11/30 0:00:00

Study on Single Event Transient in a Deep Submicron CMOS Inverter
GAO Cheng,ZHANG Rui,WANG Yihao and HUANG Jiaoying.Study on Single Event Transient in a Deep Submicron CMOS Inverter[J].Microelectronics,2019,49(5):729-734.
Authors:GAO Cheng  ZHANG Rui  WANG Yihao and HUANG Jiaoying
Affiliation:School of Reliability and Systems Engineering, Beihang University, Beijing 100191, P. R. China,School of Reliability and Systems Engineering, Beihang University, Beijing 100191, P. R. China,School of Reliability and Systems Engineering, Beihang University, Beijing 100191, P. R. China and School of Reliability and Systems Engineering, Beihang University, Beijing 100191, P. R. China
Abstract:Aiming at the single event transient effect of small size CMOS inverters, single event effect simulation and pulsed laser simulation experiments were carried out. A deep submicron CMOS inverter (SN74LVC2GU04) was selected as the research object. The key dimensions of the device were determined, and the two-dimensional model of the CMOS inverter was built. The single event transient effect simulation of the deep submicron CMOS device was completed, and the threshold range was obtained. At the same time, the experiment of single event transient by pulsed laser facility was carried out to locate the sensitive region of the device, capture the single event transient pulse generated by the device under different irradiation energy, determine the threshold range of the single event transient, and compare with the previous simulation of single event transient.
Keywords:CMOS inverter  single event transient (SET)  TCAD simulation  pulsed laser experiment
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