Affiliation: | a Department of Mechanical and Automation Engineering, I-Shou University, Kaohsiung County 840, Taiwan, ROC b Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung 804, Taiwan, ROC c Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, No. 1 University Road, Tainan 701, Taiwan, ROC |