| 离子束溅射作用下聚四氟乙烯薄膜的制备方法 |
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| 引用本文： | 王立铎,何建立,贺小明,王英华,李文治,李恒德.离子束溅射作用下聚四氟乙烯薄膜的制备方法[J].真空科学与技术学报,1998,18(3):224-226. |
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| 作者姓名： | 王立铎 何建立 贺小明 王英华 李文治 李恒德 |
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| 作者单位： | 清华大学材料科学与工程系,北京,100084 |
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| 摘 要： | 在多功能离子束辅助沉积装置上采用交替溅射和冷却聚四氟乙烯靶材的方法制备了薄膜。由XPS的结果可知，所得薄膜主要由CF2结构组成；FT-IR的结果表明，所得薄膜由C-F的最强吸收峰和聚四氟乙烯的特征吸收峰构成。所得薄膜的这些结构特征与聚四氟乙烯的结构是一致的。试验结果表明，用这种离子束溅射沉积方法可以获得聚四氟乙烯薄膜。
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| 关 键 词： | 聚四氟乙烯薄膜 离子束溅射沉积 X射线光电子能谱 傅立叶变换红外光谱 |
| 修稿时间： | 1997年3月20日 |
Studies of Teflon Films Grown by Ion Beam Sputtering |
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| WANG Liduo,He jianli,He Xiaoming,WANG Yinghua,Li Wenzhi,Li Hengde.Studies of Teflon Films Grown by Ion Beam Sputtering[J].JOurnal of Vacuum Science and Technology,1998,18(3):224-226. |
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| Authors: | WANG Liduo He jianli He Xiaoming WANG Yinghua Li Wenzhi Li Hengde |
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| Abstract: | Teflon thin films were successfully prepared by alternative sputtering and cooling the teflon target in the home built polyfunctional ion beam assisted deposition system. The teflon films were studied with XPS and FT-IR techniques,respectively. The XPS spectra showed that CF2 structures are predominant in the films, and the FT-IR results showed that C-F absorption and teflon characteristic absorption are respensaible for the two strong peaks observed. The films can be well identified as teflon with the experimental results. |
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| Keywords: | Teflon thin film Ion beam sputtering deposition XPS FT-IR |
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