| 一种大功率直流溅射电源的设计 |
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| 引用本文： | 姚立斌. 一种大功率直流溅射电源的设计[J]. 红外技术, 1996, 18(6): 31-32 |
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| 作者姓名： | 姚立斌 |
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| 作者单位： | 昆明物理研究所 |
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| 摘 要： | 介绍一种大功率直流溅射恒流电源的设计。该设计解决了溅射过程中的打火及电流不易控制的问题。经实用证明，该设计达到了预期的效果。
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| 关 键 词： | 直流溅射 恒流源 电源 设计 |
The Design of a Power Source for DC Sputtering |
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| Yao Libin. The Design of a Power Source for DC Sputtering[J]. Infrared Technology, 1996, 18(6): 31-32 |
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| Authors: | Yao Libin |
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| Abstract: | The design of a DC sputtering power source was presented. Experiments show that the sparking and current fluctuation during the sputtering processing were effectively depressed with this source. |
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| Keywords: | DC sputtering DC sputtering power source Constant current source |
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