| ZnO薄膜的丙酮气敏特性研究 |
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| 引用本文： | 邱美艳,孙以材,潘国锋,杜鹏,李辉. ZnO薄膜的丙酮气敏特性研究[J]. 电子元件与材料, 2007, 26(5): 46-48,52 |
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| 作者姓名： | 邱美艳 孙以材 潘国锋 杜鹏 李辉 |
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| 作者单位： | 河北工业大学微电子研究所,天津,300130;河北工业大学微电子研究所,天津,300130;河北工业大学微电子研究所,天津,300130;河北工业大学微电子研究所,天津,300130;河北工业大学微电子研究所,天津,300130 |
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| 摘 要： | 用直流磁控反应溅射法,分别在Si(111)基片及Al2O3陶瓷基片上制备了ZnO薄膜,并进行TiO2、SnO2、Al2O3或CuO的掺杂和退火处理。用XRD分析了退火前后晶型的变化,利用气敏测试系统对各样品进行了气敏特性测试。结果表明:经过700℃退火后的样品,在最佳工作温度为220℃时,对丙酮有很好的选择性和很高的灵敏度(34.794)。掺杂TiO2或SnO2,可提高ZnO薄膜传感器对丙酮的灵敏度(57.963)。
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| 关 键 词： | 半导体技术 ZnO薄膜 传感器 丙酮 选择性 |
| 文章编号： | 1001-2028（2007）05-0046-03 |
| 修稿时间： | 2006-12-23 |
Investigation on acetone sensing properties of ZnO thin films |
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| QIU Mei-yan,SUN Yi-cai,PAN Guo-feng,DU Peng,LI Hui. Investigation on acetone sensing properties of ZnO thin films[J]. Electronic Components & Materials, 2007, 26(5): 46-48,52 |
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| Authors: | QIU Mei-yan SUN Yi-cai PAN Guo-feng DU Peng LI Hui |
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| Affiliation: | Microelectron Research Institute, Hebei University of Technology, Tianjin 300130, China |
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| Abstract: | ZnO thin films and ZnO thin films doped with TiO2、SnO2、Al2O3 or CuO were prepared both on Si(111) and alumina ceremic substrates by DC reactive magnetron sputtering,and annealing was carried out.The structures of the thin films unannealed and annealed were studied by XRD,the sensing properties of each sample were tested by gas sensing measurements.The results show that after 700 ℃ annealing,the sample has excellent selectivity and high sensitivity(34.794) towards acetone at 220 ℃ of the optimum operating temperature.And the sensitivity of ZnO thin films sensor to acetone is increased to 57.963 by doping with TiO2 or SnO2. |
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| Keywords: | semiconductor ZnO thin films sensor acetone selectivity |
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