基于谐振原理的RF MEMS滤波器的研制

采用与IC工艺兼容的硅表面MEMS加工技术,以碳化硅材料作为结构材料,研制出一种新型的基于谐振原理工作的RF MEMS滤波器。详细介绍了器件的工作原理、制备方法、测试技术和结果,并对测试结果做出分析。该RF MEMS滤波器由弹性耦合梁连接两个结构尺寸和谐振频率完全相同的MEMS双端固支梁谐振器构成,MEMS谐振器的结构决定了滤波器的中心频率,弹性耦合梁的刚度决定了滤波器的带宽。在大气环境下测试器件的频响特性,得到中心工作频率为41.5MHz,带宽为3.5MHz,品质因数Q为11.8。

Fabrication of the RF MEMS Filter Based on Resonance

With the silicon carbide material as the structural material,a new RF MEMS filter based on resonance was fabricated by silicon surface MEMS processing technology compatible with IC process.The working principle,fabrication process,test technology and results of the device were introduced in detail,and the test results were analyzed.The RF MEMS filter is composed of two MEMS double end fixed supported beam resonators with the same structure size and resonant frequency which are connected with the elastic coupling beam.The center frequency of the filter is determined by the structure of MEMS resonator,and the bandwidth of the filter is determined by the stiffness of the elastic coupling beam.The frequency response characteristics of the filter were tested under the atmosphere condition.The results show that the center frequency of 41.5 MHz,the band width of 3.5 MHz and the qua-lity factor Q value of 11.8 are achieved.