新型体声波传感器读出电路的实验验证

为了实验验证此前通过仿真验证的基于六端口反射计的新型BAW传感器读出电路的方案的可行性,本文制作了新型BAW传感器读出电路并对其进行了测试.以串联谐振频率约为1.5 GHz的薄膜体声波谐振器(FBAR)为待测器件(DUT),设计、制作了一种能够满足该FBAR谐振频率测量带宽(1.3 GHz~1.7 GHz)要求的PCB上微带六端口网络和检波器,配合射频信号发生器和示波器,获得了模拟DUT(50ΩSMA匹配负载)的反射系数-频率(Γ-f)曲线测量结果.与矢量网络分析仪(VNA)的测量结果进行了对比,两者吻合较好,实验验证了"基于六端口反射计的BAW传感器读出电路"可用于FBAR谐振频率的测量.本文工作对实用化BAW传感器的研制和片上矢量网络分析仪(VNA-on-Chip)的设计都有借鉴意义.

Experimental validation of novel bulk acoustic wave sensor read-out circuit

In order to experimentally verify the feasibility of the scheme of the new BAW sensor readout circuit based on six-port reflector,a new type of BAW sensor readout circuit was fabricated and tested. The film bulk acous?tic resonator(FBAR)with series resonant frequency is about 1.5 GHz is the device under test(DUT). Microstrip six port network and detector on PCB are designed and fabricated,which can meet the requirements of FBAR resonant frequency measurement bandwidth(1.3 GHz~1.7 GHz). Measurement result of the reflection coefficient frequency (Γ-f)curve of the simulated DUT(50ΩSMA matched load)is obtained by using radio frequency signal generator and oscilloscope. The measurement result from six-port reflectometer is quite consistent with the measurement re?sult from vector network analyzer(VNA).Thus the scheme that"the BAW sensor readout circuit based on six-port reflectometer"can be used for the measurement of FBAR resonant frequency is verified by experiment. The work re?ported is useful for the practical BAW sensor development and the vector network analyzer on the chip(VNA-on-chip)design.