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调Q脉冲CO2激光切割Si3N4工程陶瓷的机理研究
引用本文:洪蕾,李力钧,鞠春雷. 调Q脉冲CO2激光切割Si3N4工程陶瓷的机理研究[J]. 机械工程学报, 2002, 38(6): 61-65
作者姓名:洪蕾  李力钧  鞠春雷
作者单位:清华大学材料科学与工程博士后流动站,北京,100084;湖南大学
基金项目:( 国家自然科学基金资助项目(59875018).
摘    要:采用调Q脉冲CO2激光器对Si3N4工程陶瓷进行了切割试验.在计及切口烧蚀前沿形状和高斯光束空间能量分布的前提下,采用简化的二维模型,针对气化切割过程,在能量平衡基础上,建立了一个脉冲激光切割数学模型.试验结果表明,采用高速多次重复走刀工艺可实现无损伤激光切割.

关 键 词:Si3N4  调Q脉冲CO2激光  切割  数学模型
修稿时间:2000-05-24

INVESTIGATION OF CUTTING OF Si3N4 ENGINEERING CERAMICS WITHQ-SWITCHED PULSE CO2 LASER
Hong Lei. INVESTIGATION OF CUTTING OF Si3N4 ENGINEERING CERAMICS WITHQ-SWITCHED PULSE CO2 LASER[J]. Chinese Journal of Mechanical Engineering, 2002, 38(6): 61-65
Authors:Hong Lei
Affiliation:Hong Lei(Tsinghua University)Li Lijun Ju Chunlei(Hunan University)
Abstract:Cutting of Si3N4 engineering ceramics with Q-switched pulse CO2 laser. Considering the effective shape of the cut front that has influence to the absorption of the laser beam, a mathematics model considering a simplified 2D geometry based on the geometry of a pulsed laser cut during vaporization cutting process is developed. This model is based on the energy balance. The experiment results show that it would realize crack-free cutting by using high speed and multipass cutting.
Keywords:Si3N4 Q-switched pulse CO2 laser Cutting Mathematics model  
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