|
|||||
|
|
| CO2激光对熔石英损伤修复的研究进展 | |
| 引用本文： | 罗成思,袁晓东,刘春明,向霞,章春来,吕海兵,祖小涛. CO2激光对熔石英损伤修复的研究进展[J]. 材料导报, 2011, 25(19): 118-122 |
| 作者姓名： | 罗成思 袁晓东 刘春明 向霞 章春来 吕海兵 祖小涛 |
| 作者单位： | 1. 中国工程物理研究院激光聚变研究中心,绵阳621900; 电子科技大学物理电子学院,成都610054 2. 中国工程物理研究院激光聚变研究中心,绵阳,621900 3. 电子科技大学物理电子学院,成都,610054 |
| 基金项目： | 国家“863”课题(2008AA8040508) |
| 摘 要： | CO2激光对熔石英损伤修复的机理主要是通过激光的热效应使表面发生熔融,对损伤处起到弥合作用使元件的表面结构趋于完整。近几年CO2激光修复的方法按激光扫描方式可以分为光栅式扫描法和振镜扫描法。利用逐渐提高功率的扫描方式可以有效减少修复过程中气泡的产生,用高温退火的方式可以完全消除或者消除大部分修复后产生的应力,这取决于损伤点的尺寸。多种处理工艺相结合的方法可以有效提高修复后的损伤阈值。 |
| 关 键 词： | 熔石英 CO2激光 激光诱导损伤 损伤修复 |
Research Development of CO2 Laser Treatment for Repair Damage in Fused Silica |
|
| LUO Chengsi,YUAN Xiaodong,LIU Chunming,XIANG Xia,ZHANG Chunlai,LU Haibing,ZU Xiaotao. Research Development of CO2 Laser Treatment for Repair Damage in Fused Silica[J]. Materials Review, 2011, 25(19): 118-122 | |
| Authors: | LUO Chengsi YUAN Xiaodong LIU Chunming XIANG Xia ZHANG Chunlai LU Haibing ZU Xiaotao |
| Affiliation: | 1 Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900;2 School of Physical Electronics,University of Electronic Science and Technology of China,Chengdu 610054) |
| Abstract: | The mechanism of CO2 laser treatment for repair damage in fused silica is mainly using laser heating methods,and smoothing the damage point.In recent years,the methods of CO2 laser treatment can be classified into raster scanning and galvanometer scanning in terms of scanning methods.The number of bubbles can be reduced by slowly increasing the power of the surface during mitigation.And the stress can be completely or partly eliminated by high temperature annealing,it depends on the size of damage point.Combining various forms of methods can improve the damage threshold obviously. |
| Keywords: | fused silica CO2 laser lased induced damage damage repair |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |