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数控气囊式抛光结构设计与非球面加工工艺技术研究
引用本文:孔琳,贾宗合,邵维,刘冬梅,付秀华. 数控气囊式抛光结构设计与非球面加工工艺技术研究[J]. 长春理工大学学报(自然科学版), 2016, 39(6): 27-30
作者姓名:孔琳  贾宗合  邵维  刘冬梅  付秀华
作者单位:长春理工大学 光电工程学院,长春,130022;吉林东光集团有限公司,长春,130022
基金项目:吉林省重大科技攻关专项(1040203002GX),国家高技术研究发展计划(12349876)
摘    要:
非球面光学元件由于具有改善系统成像质量、提高光学性能等特点被广泛的应用于各类光电产品中,因此如何抛光加工出高精度非球面元件成为国内外学者面临的难题.对数控气囊抛光方法抛光非球面元件的工艺进行研究,分析气囊抛光的加工原理,设计气囊式抛光头的结构,并对材料去除函数进行分析.在实验过程中使用硅胶气囊与橡胶气囊对非球面元件进行抛光对比,采用轮廓仪测量非球面面型,并使用高倍放大镜检测表面质量.结果表明,利用数控气囊抛光方法可以加工出光滑的非球面表面,粗糙度为0.9nm,该方法是抛光高精密非球面光学元件的有效方法,且数控气囊抛光工艺具有可扩展性.

关 键 词:数控气囊式抛光  去除函数建模  结构设计  非球面  高精度

The CNC Bonnet Polishing Structure Design and Study on Machining Technology of Aspheric Surface
KONG Lin,JIA Zonghe,SHAO Wei,LIU Dongmei,FU Xiuhua. The CNC Bonnet Polishing Structure Design and Study on Machining Technology of Aspheric Surface[J]. Journal of Changchun University of Science and Technology, 2016, 39(6): 27-30
Authors:KONG Lin  JIA Zonghe  SHAO Wei  LIU Dongmei  FU Xiuhua
Abstract:
Aspheric optical components are widely applied in various types of optoelectronic products due to the charac-teristics of improving the system imaging quality and the optical properties. Therefore, how to produce high precision aspherical components become the problem faced by domestic and foreign scholars. In this paper,the process of polish-ing aspheric components by the CNC bonnet polishing method is studied, and both the processing principle of bonnet polishing and material removal function are analyzed, the structure of the bonnet polishing grinding head is designed, In the experimental process, using silicone gasbag and the rubber gasbag of aspherical components are comparatively polishing,In the experimental process,using silicone gasbag and rubber gasbag to polishing contrast for aspherical elements.
Keywords:bonnet tool polishing with CNC machine  removal function modeling  structure design  aspheric surface  high precision
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