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| f-(θ)物镜非线性扫描误差的检测研究 | |
| 引用本文： | 郑旭峰,倪旭翔,陆祖康,王立强. f-(θ)物镜非线性扫描误差的检测研究[J]. 光电工程, 2004, 31(4): 9-12 |
| 作者姓名： | 郑旭峰 倪旭翔 陆祖康 王立强 |
| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027;浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027;浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027;浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027 |
| 基金项目： | 国家自然科学基金项目(30227002) |
| 摘 要： | 在振镜和f -q 线性扫描物镜构成的线性扫描机构中,f -q 物镜的设计、加工误差会引起一定的非线性扫描误差,影响扫描成像的质量。为了检测f -q 物镜的非线性扫描误差,使用基于线阵CCD的检测电路和扫描光点位置检测算法进行了实验研究,得到了可用于校正的扫描光点位置以及振镜摆角的对应关系曲线和f -q 物镜的非线性扫描误差曲线。 |
| 关 键 词： | 生物芯片扫描仪 f-(θ)物镜 非线性扫描误差 误差检测 |
| 收稿时间： | 2003-07-21 |
Detection of nonlinear scanning error for f-theta objective |
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| ZHENG Xu-feng,NI Xu-xiang,LU Zu-kang,WANG Li-qiang. Detection of nonlinear scanning error for f-theta objective[J]. Opto-Electronic Engineering, 2004, 31(4): 9-12 | |
| Authors: | ZHENG Xu-feng NI Xu-xiang LU Zu-kang WANG Li-qiang |
| Abstract: | In a linear scanning mechanism constituted by polarization filter and f -theta linear scanning objective, the design and processing errors of f -theta objective will cause some nonlinear scanning errors and will affect scanning imaging quality. In order to measure nonlinear scanning error of the f -theta objective, an experimental study is carried out by using detection circuit based on linear CCD and a scanning spot position detection algorithm. In this way the corresponding relation curve between scanning spot position vs. polarization filter tilt angle and nonlinear scanning error curve of f-theta objective are obtained, and these curves can be applied to calibrating nonlinear scanning error. |
| Keywords: | Biochip scanner f -theta objective Nonlinear scanning error Error detection |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |