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GaAs field-effect transistors by selective sulphur-ion implantation
Authors:Mizutani   T. Ishida   S. Fujimoto   M.
Affiliation:NTT, Electrical Communication Laboratories, Musashino, Japan;
Abstract:GaAs field-effect transistors without a mesa structure have been fabricated by selective sulphur-ion implantation into Cr-doped GaAs substrates. The transconductance was 16 mS and the maximum oscillation frequency was 30 GHz.
Keywords:
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