| 离散事件仿真及其在半导体生产线建模中的应用 |
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| 引用本文： | 王中杰.离散事件仿真及其在半导体生产线建模中的应用[J].系统仿真技术,2005,1(3):173-176. |
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| 作者姓名： | 王中杰 |
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| 作者单位： | 同济大学控制科学与工程系,上海,200092 |
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| 基金项目： | 国家自然科学基金项目(70201004)，国家973项目(2002CB312202)，上海市青年科技启明星计划项目(04QMX1429)资助 |
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| 摘 要： | 详细阐述了离散事件仿真技术的原理及其关键技术,并将其应用于半导体生产线建模。在分析半导体生产线系统的仿真需求的基础上,以单进程为离散事件处理机制,对12个加工中心、40台机器组成的半导体生产线进行了建模研究,验证了半导体生产线仿真的正确性。
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| 关 键 词： | 离散事件仿真 半导体生产线 建模 |
Discrete Event Simulation and Its Application to Modeling of Semiconductor Manufacturing Line |
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| WANG Zhongjie.Discrete Event Simulation and Its Application to Modeling of Semiconductor Manufacturing Line[J].System Simulation Technology,2005,1(3):173-176. |
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| Authors: | WANG Zhongjie |
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| Abstract: | The principle and its key technologies of discrete event simulation are discussed in detail, and the discrete event technology is employed to modeling of semiconductor manufacturing line. Based on the analysis of system requirement for simulating the semiconductor manufacturing line, the single course is taken as the discrete event disposing mechanism, the model of a semiconductor manufacturing line with 12 working centers and 40 machines is established. It proved the validity of modeling of semiconductor manufacturing line. |
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| Keywords: | discrete event simulation semiconductor manufacturing line modeling |
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