| 关于几种超硬非金属材料高精度基片研抛方法的研究 |
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| 引用本文： | 史兆礼.关于几种超硬非金属材料高精度基片研抛方法的研究[J].电子元件与材料,1995,14(4):48-51. |
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| 作者姓名： | 史兆礼 |
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| 作者单位： | 中国科学院计算技术研究所 |
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| 摘 要： | 提出了不同性能的六种非金属材料如超硬陶瓷（ＴｉＣ－Ａｌ２Ｏ３）、超硬薄膜（Ａｌ２Ｏ３）、铁氧体、玻璃陶瓷的研抛方法，获得了低表面粗糙度、高平面度及高平行度的基片。关键词
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| 关 键 词： | 超硬陶瓷，超硬薄膜，玻璃陶瓷，铁氧体，研磨抛光 |
Research of Lapping and Polishing Methods for High Precise Substrates of Several Superhardness Nonmetal Materials |
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| Shi Zhaoli.Research of Lapping and Polishing Methods for High Precise Substrates of Several Superhardness Nonmetal Materials[J].Electronic Components & Materials,1995,14(4):48-51. |
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| Authors: | Shi Zhaoli |
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| Abstract: | Lapping and polishing methods for six kinds of nonmetal materials with different properties. such as superhardness ceramic (TiC-Al2O3), superhardness thin film (Al2O3), ferrite. glass ceramic are provided. Substrates of high planeness, high parallelism and low roughness were obtained. |
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| Keywords: | superhardness ceramic superhardness thin film glass ceramic ferrite lapping and polishing methods |
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