Integration of 2D and 3D Thin Film Glassy Carbon Electrode Arrays for Electrochemical Dopamine Sensing in Flexible Neuroelectronic Implants

Here we present the development and characterization of a flexible implantable neural probe with glassy carbon electrode arrays. The use of carbon electrodes allows for these devices to be used as chemical sensors, in addition to their typical use as electrical sensors and stimulators. The devices are fabricated out of polyimide, platinum, titanium, and carbon with standard microfabrication techniques on carrier wafers. The devices are released from the substrate through either chemical or electrochemical dissolution of the underlying substrate material. The glassy carbon electrode arrays are produced through the pyrolysis of SU‐8 pillars at 900 °C as the first process step, as this temperature is incompatible with the other device materials. The process demonstrated here is generally applicable, allowing for the integration of various high temperature materials into flexible devices.