Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD |
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| Authors: | XD Yang T Saito Y Nakamura Y Kondo N Ohtake |
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| Affiliation: | aDepartment of Mechanical Sciences and Engineering, 401A room of Ishikawadai No. 3 Building, Tokyo Institute of Technology, O-okayama 2-12-1, Meguro-ku, Tokyo 152-8552, Japan;bNGK INSULATORS, LTD., Nagoya, Japan |
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| Abstract: | Diamond-like carbon (DLC) films are metastable amorphous carbon materials with superior tribological characteristics. In order to improve wear resistance of micro-extrusion dies with numerous imperceptible holes, DLC films were deposited on the inner wall surface of model dies with holes of 2 and 0.9 mm in diameter, and 20 mm in depth by using pulse plasma CVD method. This paper will discuss how argon gas, deposition pressure and time affect the characteristics of films deposited on the inner wall surface of dies. This micro-coating method can be applied widely for inner wall surface treatment of components with thin holes. |
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| Keywords: | Diamond-like carbon Pulse plasma CVD Micro-extrusion die Micro-coating |
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