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WO3基低浓度NO2气敏传感器的研究
引用本文:王大伟,黄世震.WO3基低浓度NO2气敏传感器的研究[J].计测技术,2006,26(Z1):50-53.
作者姓名:王大伟  黄世震
作者单位:福州大学气敏传感器研究所,福州大学气敏传感器研究所 福建 福州 350002 福建省微电子集成电路重点实验室,福建 福州 350002,福建 福州 350002 福建省微电子集成电路重点实验室,福建 福州 350002
摘    要:分别采用改进前后的溶胶-凝胶法制备WO3纳米材料,制作成直热式球形气敏元件,对低浓度的NO2气体进行测试.结果表明,改进后的溶胶-凝胶法制备的WO3材料,粒径小,表面疏松,对低浓度甚至极低浓度的NO2气体有很好的灵敏度,响应恢复时间很快,选择性好,而且所有元件都在较低的工作电压下有最高的灵敏度,说明工作温度低有利于降低功耗.

关 键 词:WO3  溶胶-凝胶法  NO2  低浓度  气体传感器

Study of a Low Concentration NO2 Gas Sensor Based WO3 Nanometer Material
WANG Da-wei,HUANG Shi-zhen.Study of a Low Concentration NO2 Gas Sensor Based WO3 Nanometer Material[J].Metrology & Measurement Technology,2006,26(Z1):50-53.
Authors:WANG Da-wei  HUANG Shi-zhen
Abstract:The WO3 nanometer material can be prepared by sol-gel and improved sol-gel. We use it to make the direct-heating type gas sensor,and carry on the test to the low density NO2 gas. The result indicates that the WO3 material prepared by improved sol-gel has a very small particle size, its surface is loose,and it has very good sensitivities to low concentration even extremely low concentration NO2 gas. The element responds and resumes very quickly and has good selectivity. All elements have supreme sensitivity under lower working voltage, which means that the working temperature is relatively low. It helps to reduce the power consumption.
Keywords:WO3  sol-gel  NO2  low concentration  gas sensor
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