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| 一种新型垂直扫描白光显微干涉测量仪 | |
| 引用本文： | 王生怀,陈育荣,谢铁邦.一种新型垂直扫描白光显微干涉测量仪[J].工具技术,2010,44(1):81-84. |
| 作者姓名： | 王生怀 陈育荣 谢铁邦 |
| 作者单位： | 1. 湖北汽车工业学院;华中科技大学 2. 湖北汽车工业学院 3. 华中科技大学 |
| 基金项目： | 国家自然科学基金项目(50745020);;湖北省教育厅重点项目(D20092301,D20082301) |
| 摘 要： | 研究开发了一种新型垂直扫描白光显微干涉测量仪。基于Linnik显微干涉结构,设计了干涉测量仪的显微干涉系统,介绍了干涉系统的工作原理;设计了Z向一维位移工作台,介绍了其结构和驱动原理;分析了测量仪的工作原理,并采用标准样板对测量仪的测量精度进行了验证。 |
| 关 键 词： | 垂直扫描 白光干涉 显微干涉系统 一维位移工作台 |
A Novel Vertical Scanning White Light Microscopy Interference Instrument |
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| Wang Shenghuai,Chen Yurong,Xie Tiebang.A Novel Vertical Scanning White Light Microscopy Interference Instrument[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2010,44(1):81-84. | |
| Authors: | Wang Shenghuai Chen Yurong Xie Tiebang |
| Affiliation: | Wang Shenghuai,Chen Yurong,Xie Tiebang,Doctoral C,idate,College of Mechanical Engineering,Huazhong University of Science , Technology,Hubei,Wuhan 430074,China |
| Abstract: | A novel vertical scanning white light microscopy interference instrument has been developed.The microscopy interference system of this instrument is designed based on the structure of Linnik interference microscopy,and the working principle is introduced.The 1D worktable of Z direction is designed;the structure and driving principle are introduced.The work principle of the interference instrument is analyzed and the measurement precision is verified by measuring standard samples. |
| Keywords: | vertical scanning white light interference microscopy interference system 1D displacement worktable |
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