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Mid-infrared ridge waveguide in MgO:LiNbO3 crystal produced by combination of swift O5+ ion irradiation and precise diamond blade dicing
Affiliation:1. School of Physics, State Key Laboratory of Crystal Materials and Key Laboratory of Particle Physics and Particle Irradiation (MOE), Shandong University, Jinan 250100, China;2. Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Dresden 01314, Germany;3. The MOE Key Laboratory of Weak-Light Nonlinear Photonics and TEDA Applied Physics School, Nankai University, Tianjin 300457, China;1. Department of Physics, Pacific Union College, Angwin, CA 94508, USA;2. Department of Physics, University of Wisconsin, Madison, WI 53706, USA;3. Department of Physics, Albion College, Albion, MI 49224, USA;4. Physics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, USA;1. Department of Physics, Bishop Moore College, Mavelikara, 690110 Kerala, India;2. Department of Physics, Government Arts College for Women (Autonomous), Pudukottai, India;3. Department of Chemistry, Nanjing University of Science and Technology, Xialingwei 200, Nanjing, People’s Republic of China;4. Light and Matter Physics Group, Raman Research Institute, C.V. Raman Avenue, Sadashiva Nagar, Bangalore 560080, India;1. Institute of Physics, Jilin Normal University, Siping 136000, China;2. School of Physics and Electronic Engineering of Anqing Normal University, Anqing 246133, China
Abstract:We report on the fabrication of ridge waveguide operating at mid-infrared wavelength in MgO:LiNbO3 crystal by using O5+ ion irradiation and precise diamond blade dicing. The waveguide shows good guiding properties at the wavelength of 4 μm along the TM polarization. Thermal annealing has been implemented to improve the waveguiding performances. The propagation loss of the ridge waveguide has been reduced to be 1.0 dB/cm at 4 μm after annealing at 310 °C. The micro-Raman spectra indicate that the microstructure of the MgO:LiNbO3 crystal has no significant change along the ion track after swift O5+ ion irradiation.
Keywords:Optical waveguide  Ion irradiation  Diamond blade dicing  Mid-infrared waveguides
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