| 一种基于LabVIEW的相位法PSD微位移测量系统设计 |
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| 引用本文： | 吴腾蛟,薛联,段莹,席锋,秦岚.一种基于LabVIEW的相位法PSD微位移测量系统设计[J].传感器与微系统,2011,30(12):116-118. |
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| 作者姓名： | 吴腾蛟 薛联 段莹 席锋 秦岚 |
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| 作者单位： | 重庆大学光电技术及系统教育部重点实验室,重庆,400044 |
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| 摘 要： | 基于相位法的位置敏感探测器(PSD)检测技术较之幅值法具有处理电路简单、检测精度高、抗干扰能力强、环境适应性好等优点.利用二维双面分流型PSD和LabVIEW虚拟仪器平台,实现了基于相位法的PSD微位移测量系统的设计.实验表明:PSD输出信号的相位差和光斑位置具有良好的线性关系,非线性误差小于0.1％.
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| 关 键 词： | 位置敏感探测器 相位法 LabVIEW 虚拟仪器 微位移测量 |
Design on a phase method PSD micro-displacement measurement system based on LabVIEW |
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| WU Teng-jiao,XUE Lian,DUAN Ying,XI Feng,QIN Lan.Design on a phase method PSD micro-displacement measurement system based on LabVIEW[J].Transducer and Microsystem Technology,2011,30(12):116-118. |
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| Authors: | WU Teng-jiao XUE Lian DUAN Ying XI Feng QIN Lan |
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| Abstract: | PSD detection technique based on phase method has advantages of simple processing circuit,high detecting precision,strong anti-interference ability and good environmental adaptability,compared with amplitude method.A micro-displacement measurement system based on LabVIEW and 2D duo-lateral PSD is designed.Experimental results reveal that the phase difference of the PSD output signal and the light spot position have good linear relation,and the nonlinear error is less than 0.1 %. |
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| Keywords: | position sensitive detector(PSD) phase method LabVIEW virtual instrument micro-displacement measurement |
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