| 适用于微机电器件的钯-镍合金膜层的制备 |
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| 引用本文： | 王利卿,张国辉.适用于微机电器件的钯-镍合金膜层的制备[J].电镀与环保,2020(2):1-3. |
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| 作者姓名： | 王利卿 张国辉 |
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| 作者单位： | 河南水利与环境职业学院机电与信息工程系;郑州航空工业管理学院管理工程学院 |
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| 基金项目： | 河南省职业教育教学改革研究项目(ZJA15155)。 |
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| 摘 要： | 以紫铜片为基体,采用脉冲电沉积方法制备了钯-镍合金膜层。选取占空比和脉冲频率作为变量,分别研究了占空比和脉冲频率对钯-镍合金膜层的孔隙率和内应力的影响。结果表明:随着占空比的增大,孔隙率升高,内应力先减小后增大;随着脉冲频率的提高,孔隙率明显降低,内应力增大;当占空比为20%~30%、脉冲频率为1.0 kHz时,采用脉冲电沉积方法能制备出适用于微机电器件的钯-镍合金膜层。
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| 关 键 词： | 钯-镍合金膜层 微机电器件 孔隙率 内应力 |
Preparation of Pd-Ni Alloy Film for Micro-electro-mechanical Devices |
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| WANG Liqing,ZHANG Guohui.Preparation of Pd-Ni Alloy Film for Micro-electro-mechanical Devices[J].Electroplating & Pollution Control,2020(2):1-3. |
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| Authors: | WANG Liqing ZHANG Guohui |
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| Affiliation: | (Department of Mechanical Electrical and Information Engineering,Henan Vocational College of Water Conservancy and Environment,Zhengzhou 450008,China;School of Management Engineering,Zhengzhou University of Aeronautics,Zhengzhou 450015,China) |
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| Abstract: | Pd-Ni alloy film was prepared on red copper sheet by pulse electrodeposition.The duty cycle and pulse frequency were taken as variables during the experiment,and the influence of duty cycle and pulse frequency on the porosity and internal stress of Pd-Ni alloy film were studied separately.The results showed that the porosity was increased and the internal stress was decreased first and then increased with the increasing of duty cycle.The porosity was obviously decreased and the internal stress was increased with the increasing of pulse frequency.When the duty cycle was 20%?30%and pulse frequency was 1.0 kHz,Pd-Ni alloy film for micro-electromechanical devices can be prepared by pulse electrodeposition. |
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| Keywords: | Pd-Ni alloy film micro-electro-mechanical devices porosity internal stress |
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