沉积气压对W-S-C复合薄膜结构和摩擦学性能的影响

采用磁控溅射方法制备W-S-C复合薄膜,研究沉积气压对薄膜结构和摩擦学性能的影响。结果表明,复合膜以非晶或纳米晶结构生长,沉积气压低时薄膜中C含量高,薄膜结构致密;沉积气压高时薄膜中WSx含量高,薄膜致密性下降。复合膜硬度在HV420～500之间,并且随着沉积气压的增加,硬度逐渐下降。在潮湿大气中的摩擦磨损实验表明,实验载荷越大摩擦因数越小;随着沉积气压的增加,复合膜的摩擦因数先降低后增加;当沉积气压在0.45～0.55 Pa时,复合膜的摩擦因数最低约为0.1,耐磨性能最好。

Influence of Deposition Pressure on Structure and Tribological Properties of W-S-C Composite Films

W-S-C composite films were prepared by magnetron sputtering method.Influence of deposition pressure on the structure and tribological properties of composite films was investigated.The results show that the composite films present amorphous or nano structure.Higher C content and more compact structure are obtained with low deposition pressure,while higher WSx content and looser structure is found with higher deposition pressure.The microhardness of composite films is between HV420~500 and it decreases with increasing the deposition pressure.The results of pin-on-disc friction and wear test in humidity air show that the friction coefficient of the composite films decreases with increasing the test load and it exhibits better wear resistance and the lowest friction coefficient(about 0.1)under the deposition pressure of 0.45~0.55 Pa.