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Submicron machining and biomolecule immobilization on porous silicon by electron beam
Authors:Dario Imbraguglio  Andrea Mario Giovannozzi  Annalisa Nastro  Andrea Mario Rossi
Affiliation:1.Thermodynamics Division, Istituto Nazionale di Ricerca Metrologica, Strada delle Cacce 91, Torino, 10135, Italy
Abstract:Three-dimensional submicrometric structures and biomolecular patterns have been fabricated on a porous silicon film by an electron beam-based functionalization method. The immobilized proteins act as a passivation layer against material corrosion in aqueous solutions. The effects'' dependence on the main parameters of the process (i.e., the electron beam dose, the biomolecule concentration, and the incubation time) has been demonstrated.
Keywords:Porous silicon   Electron beam   Lithography   Micromachining   Biomolecules   87.85.Va
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