Crystalline alumina films prepared by nebulized spray pyrolysis |
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| Authors: | P Murugavel Ita Benedict A R Raju |
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| Affiliation: | (1) Chemistry and Physics of Materials Unit, Jawaharlal Nehru Centre for Advanced Scientific Research, 560 064 Bangalore, India;(2) Chemistry Department, University of Calabar, Calabar, Nigeria |
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| Abstract: | ![]()
Crystalline alumina films have been successfully deposited on Si(100) and amorphous silica substrates by the nebulized spray pyrolysis technique. The surface morphology of the films has been studied by various microscopic techniques. The films exhibit satisfactory microhardness and frequency independent capacitance. |
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| Keywords: | Crystalline alumina nebulized spray pyrolysis SEM AFM microhardness |
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