聚焦离子束技术制造金刚石切削刀具的研究

概述了基于聚焦离子束（Focused Ion Beam，FIB）加工技术制备金刚石切削刀具的相关研究进展，并介绍了金刚石刀具在超精密加工领域的研究背景及其制造现状。作为一种先进的微纳制造技术，聚焦离子束已在微尺度金刚石刀具制造研究中发挥了重要作用。针对金刚石刀具的刃口半径、刃形精度等核心参数，国内外相关研究者开展了聚焦离子束制造方法与工艺优化研究，实现了高质量刀具的制造，聚焦离子束加工可获得刃口半径为15～22nm的金刚石刀具制造。从微观切削基础和微纳光学元件制造两个角度，论述了聚焦离子束制造金刚石刀具的应用研究进展，介绍了其在纳米切削机理、微纳尺度光学元件制造中的应用。最后从提高FIB制造效率、应用研究拓展等角度，对该领域未来的发展进行了展望。

Reseach Progress of Manufacture of Diamond Cutting Tools Based on Focused Ion Beam （FIB）

The research progress of manufacture of diamond cutting tools based on Focused Ion Beam （FIB） processing technology is outlined. Firstly, the research background and manufacturing progress of diamond cutting tool applied in the ultraprecision machining field is introduced. As an advanced micro-nano manufacturing technology, focused ion beam has played an important role in the micro scale diamond tools manufacturing. Aiming at the diamond tool core parameters of cutting edge radius, edge shape accuracy, the researchers carried out the FIB method and process optimization to achieve high quality diamond tool. Research found that FIB can manufacture diamond tool with edge radius as small as 15 - 22 nm. Then, the applications of FIB diamond tools are presented from the two aspects of micro cutting mechanism and mi- cro-nano optical component manufacturing. Finally, future developments in this field are discussed, including, how to im-prove the FIB manufacturing efficiency and broaden the application field.