Numerical simulation of a polysilicon thermal flexure actuator |
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| Authors: | Y. Kuang Q.-A. Huang N. K. S. Lee |
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| Affiliation: | (1) Microelectronics Center, Southeast University, Nanjing 210096, P. R. China E-mail: hqa@seu.edu.cn, CN;(2) Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science & Technology, Clear Water Bay, Hong Kong, HK |
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| Abstract: | An electrothermal equation of a polysilicon thermal flexure actuator is presented, which takes heat conduction, air convection
and radiation into account. A numerical method is developed to solve the equation. The deflection model based on the matrix
displacement method, i.e. finite element method (FEM) in structural mechanics, is given. It transforms deflection equations
into a matrix and is easy to calculate numerically. Simulation results for the actuator with typical dimensions are presented.
Discussions are finally given.
Received: 28 April 2000/Accepted: 9 January 2001 |
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