| Al靶中稀土Y含量对薄膜CrAlTiN的影响 |
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| 引用本文： | 刘兆政,刘耀辉,蒋百灵,于思荣.Al靶中稀土Y含量对薄膜CrAlTiN的影响[J].吉林大学学报(工学版),2008,38(4):840-843. |
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| 作者姓名： | 刘兆政 刘耀辉 蒋百灵 于思荣 |
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| 作者单位： | 1. 吉林大学,材料科学与工程学院,长春,130022
2. 西安理工大学,材料科学与工程学院,西安,710048 |
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| 基金项目： | 吉林省科技厅科研项目
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吉林省长春市科技发展计划项目 |
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| 摘 要： | 研究了Al靶中加入不同含量的稀土Y对CrAlTiN薄膜的影响。应用SEM、EDS、XPS、显微硬度计对薄膜样品进行分析。结果表明,在Al靶材中加入稀土Y后,不但提高了薄膜的厚度,而且随着稀土Y含量的增加,薄膜的表面相逐渐由CrN、Cr2N向Cr变化,Al的含量也是随着Y含量的增加而增加。CrAlTiN薄膜的硬度随着稀土Y含量的升高而降低,并且随着Y含量的升高而逐渐趋于1500 HV。
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| 关 键 词： | 材料的表面和界面 磁控溅射 稀土Y SEM XPS |
| 收稿时间： | 2006-12-24 |
| 修稿时间： | 2007-05-10 |
Effect of rare earth element Y content in Al target on CrAlTiN film |
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| LIU Zhao-zheng,LIU Yao-hui,JIANG Bai-ling,YU Si-rong.Effect of rare earth element Y content in Al target on CrAlTiN film[J].Journal of Jilin University:Eng and Technol Ed,2008,38(4):840-843. |
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| Authors: | LIU Zhao-zheng LIU Yao-hui JIANG Bai-ling YU Si-rong |
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| Affiliation: | 1.College of Materials Science and Engineering, Jilin University, Changchun 130022, China; 2.College of Materials Science and Engineering, Xi'an University of Technology, Xi'an 710048, China |
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| Abstract: | The effect of the content of the rare earth element Y in the aluminium target on the CrAlTiN film was studied.The samples of CrAlTiN film were analyzed by means of the scanning electron microscope,energy dispersive spectrdmeter,X-ray photoelectron spectroscope,and micro-hardness meter.The results indicate that adding the rare earth element Y into the aluminium target material could not only raise the film thickness,but also change the surface phases,following the increase of the Y content,the film surface p... |
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| Keywords: | surface and interface of material magnetron sputtering rare earth element Y scanning electron microscope(SEM) X-ray photoelectron spectroscope(XPS) |
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