基于黏滑运动原理的单自由度纳米定位台设计与动力学分析

为解决基于扫描电镜纳米操作系统定位驱动方面的关键技术，分别研制能够实现水平定位和垂直定位的单自由度纳米定位台。定位台采用黏滑驱动原理，驱动机构采用柔性铰链设计，O形调节圈的引入既实现摩擦力的精密调节又保证整体结构的紧凑。为研究黏滑驱动原理和辅助纳米定位台设计，建立单自由度纳米定位台的动力学模型。考虑压电陶瓷的动态特性和摩擦力的非线性变化，对压电驱动模型进行线性化处理，引入LuGre模型实现对摩擦力的表达。试验结果表明该动力学模型能够有效地描述黏滑定位台的运动状态。单自由度水平和垂直纳米定位台的最大外形尺寸分别为24 mm×24 mm×17 mm和24 mm×24 mm×34 mm，均具有8 nm定位分辨率和50 mm行程，最大负载质量可达66 g。利用所设计的两种纳米定位台搭建基于SEM的双探针纳米操作系统，纳米线双探针操作试验表明该两种纳米定位台完全满足SEM下进行纳米操作的要求。

Designing and Dynamic Modeling of 1D Nanopositioner Based on Stick-slip Motion Principle

Two stick-slip inertial stages respectively for horizontal and vertical positioning are designed and built particularly for nanomanipulation inside a scanning electron microscope (SEM). The flexible hinges of drive mechanism and rubber ring for finely adjusting friction are applied to assure the entire structure compact. Due to linear dynamics of piezoelectric transducer and nonlinear friction in the stick-slip stage, a dynamical model representation based on LuGre model is presented and verified by being compared with experimental results. With largest sizes of 24 mm×24 mm×17 mm and 24 mm×24 mm×34 mm, both of horizontal and vertical stages have resolutions of 8 nm and strokes of 50 mm, while their abilities to lift up to 66g are also be demonstrated. A two-tip manipulation of nanowires is performed in assistant of the nanopositioners developed, and the excellent performance of the nanopositioner in SEM is demonstrated.