| Measurement of electrical conductivity of micron-scale metallic wires |
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| 引用本文： | JU Bing-feng JU Yang M. SAKA. Measurement of electrical conductivity of micron-scale metallic wires[J]. 中国有色金属学会会刊, 2006, 16(B02): 759-762 |
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| 作者姓名： | JU Bing-feng JU Yang M. SAKA |
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| 作者单位： | Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai, 980-8579, Japan |
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| 基金项目： | Project（17206011） supported by the Japan Society for the Promotion of Science |
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| 摘 要： | Electrical conductivltles of micron-scale aluminum wires were quantitatively measured by a four-point atomic force microscope （AFM） probe. This technique is a combination of the principles of the four-point probe method and standard AFM. This technique was applied to the 99.999% aluminum wires with 350 nm thickness and different widths of 5.0, 25.0 and 50.0 μm. Since the small dimensions of the wires, the geometrical effects were discussed in details. Experiment results show that the four-point AFM probe is mechanically flexible and robust. The four-point AFM probe technique is capable of measuring surface topography together with local electrical conductivity simultaneously. The repeatable measurements indicate that this technique could be used for fast in-situ electrical properties characterization of sensors and microelectromechanical system devices.
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| 关 键 词： | 微米级金属丝 电导率 原子力显微镜 四点探针法 测量 |
| 收稿时间： | 2006-04-10 |
| 修稿时间： | 2006-04-25 |
Measurement of electrical conductivity of micron-scale metallic wires |
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| Abstract: | |
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| Keywords: | electrical conductivity metallic wire four-point probe atomic force microscope |
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