A comparative study of tunable Ba1?x Sr x TiO3 thin film capacitors prepared by rf-sputtering and liquid-phase deposition |
| |
| Authors: | Abdelkader Outzourhit Ali Naziripour John U Trefny Tomoko Kito Baki Yarar Robert Yandrofski |
| |
| Affiliation: | 1. Department of Physics , Colorado School of Mines , Golden , CO 80401 , USA;2. Department of Physics , University of Colorado , Boulder , CO 80309 , USA;3. Department of Metallurgical and Materials Engineering Colorado , School of Mines, Golden , CO 80401 , USA;4. Superconducting Core Technologies, Golden , CO 80401 , USA |
| |
| Abstract: | Abstract Ba1?x Sr x TiO3 thin film capacitors have been successfully prepared using rf-sputtering and a metal organic deposition (MOD) method. The structure, microstructure and composition of the BSTO films are presented. Films grown on lanthanum aluminate LAO(100) showed c-axis preferred growth orientation. Broad paraelectric-to-ferroelectric transitions were observed in films prepared by both methods. The tunability of the capacitance by means of an appplied electric field is examined using various capacitor geometries. A decrease in the capacitance exceeding 75% at 77 K was obtained from the MOD deposited films under an electric field strength of 0.3 MV/cm. On the other hand, the tunability of the capacitance in the rf-sputtered films ranged from 5 to 10% at 77 K and at 20 kV/cm, while it exceeds 50% in some films. The results are compared with the predictions of Devonshire's phenomenological theory. |
| |
| Keywords: | BSTO thin films tunable capacitors tunability phenomenological theory |
|
|
