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InGaN/GaN MQW双波长LED的MOCVD生长
引用本文:沈光地,张念国,刘建平,牛南辉,李彤,邢艳辉,林巧明,郭霞.InGaN/GaN MQW双波长LED的MOCVD生长[J].半导体光电,2007,28(3):349-353.
作者姓名:沈光地  张念国  刘建平  牛南辉  李彤  邢艳辉  林巧明  郭霞
作者单位:北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022;北京工业大学,北京市光电子技术实验室,北京,100022
基金项目:国家重点基础研究发展计划(973计划) , 北京市属市管高校人才强教计划 , 北京工业大学校科研和教改项目
摘    要:利用金属有机物化学气相淀积(MOCVD)系统生长了InGaN/GaN多量子阱双波长发光二极管(LED).发现在20 mA正向注入电流下空穴很难输运过蓝光和绿光量子阱间的垒层,这是混合量子阱有源区获得双波长发光的主要障碍.通过掺入一定量的In来降低蓝光和绿光量子阱之间的垒层的势垒高度,增加注入到离p-GaN层较远的绿光有源区的空穴浓度,从而改变蓝光和绿光发光峰的强度比.研究了蓝光和绿光量子阱间垒层In组分对双波长LED的发光性质的影响.此外,研究了双波长LED发光特性随注入电流的变化.

关 键 词:InGaN量子阱  双波长LED  MOCVD
文章编号:1001-5868(2007)03-0349-05
修稿时间:2006-10-21

Dual-wavelength InGaN/GaN MQW LEDs Grown by MOCVD
SHEN Guang-di,ZHANG Nian-guo,LIU Jian-ping,NIU Nan-hui,LI Tong,XING Yan-hui,LIN Qiao-ming,GUO Xia.Dual-wavelength InGaN/GaN MQW LEDs Grown by MOCVD[J].Semiconductor Optoelectronics,2007,28(3):349-353.
Authors:SHEN Guang-di  ZHANG Nian-guo  LIU Jian-ping  NIU Nan-hui  LI Tong  XING Yan-hui  LIN Qiao-ming  GUO Xia
Affiliation:Beijing Optoelectronic Technology Lab. , Beijing University of Technology, Beijing 100022, CHN
Abstract:Dual-wavelength light emitting diodes(LEDs) with InGaN/GaN multi-quantum wells(MQW) active region were grown by metalorganic chemical vapor deposition(MOCVD).It was found that the holes were difficult to transport over the GaN potential barrier located between the blue QW and the green QWs at the forward current of 20 mA,which was the main obstacle to obtain the dual-wavelength emission for the mixed QWs active region.Band gap of barrier layer between blue quantum well and green quantum wells could be changed by incorporating a certain percent of In,which increased the injection of the hole concentration of green light active region within a long distance of the p-GaN layer and changed the emission intensity ratio of green and blue peak.The effects of In content in the barrier layer between the blue QW and the green QWs on the emission intensity of individual kinds of QW were presented.Moreover,the emission characteristic of dual wavelength LEDs dependent on injection current is examined.
Keywords:InGaN quantum well  dual-wavelength LEDs  MOCVD
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