A microheater with temperature stabilization for a scanning probe microscope

A microheater for conducting measurements by the scanning probe microscopy technique at various temperatures is described. The temperature stabilization accuracy is 0.05°C in a range of 20–80°C. A negligible temperature drift of 40 nm/°C (in the sample plane) and 100 nm/°C (along the normal) allows the study of temperature-dependent structural changes and phase transitions in polymer materials, biological objects, and other samples.