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薄膜电容型湿度控制器
引用本文:史小军 阵国平. 薄膜电容型湿度控制器[J]. 传感器与微系统, 1991, 0(4): 21-23
作者姓名:史小军 阵国平
作者单位:东南大学(史小军,陈国平),东南大学(堵国梁)
摘    要:


关 键 词:薄膜型 湿度控制器 湿敏电容

A Thin Film Capacitive Humidity-controller
Shi Xiaojun Chen Guoping Du Guoliang. A Thin Film Capacitive Humidity-controller[J]. Transducer and Microsystem Technology, 1991, 0(4): 21-23
Authors:Shi Xiaojun Chen Guoping Du Guoliang
Affiliation:South East University
Abstract:
By adopting a recently developed Ta2O5 Film humidity-sensing capacitor a current,humidity-controller with high-stability,convenience in regulation-and low-price has been suceessfully developed which has wide Use in manyfields.
Keywords:Film humidity-sensing capacitor control cireuils.
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