| 微谐振式低速气体流速传感器的有限元模拟 |
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| 引用本文： | 陈健,陈德勇,王军波.微谐振式低速气体流速传感器的有限元模拟[J].纳米技术与精密工程,2006,4(3):245-247. |
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| 作者姓名： | 陈健 陈德勇 王军波 |
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| 作者单位： | 中国科学院电子学研究所传感技术国家重点实验室,北京,100080 |
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| 摘 要： | 提出一种基于昆虫风速接受器的微谐振式仿生传感器,用以测量低速气体流动.由于设计的复杂性,使用有限元模拟对其进行评估.基于有限元模拟得到流体雷诺数与其绕流无限长梁的粘滞系数的数值关系,从而有助于确定该传感器的线性工作范围.使用有限元模拟进行流体结构耦合分析,得到气体流速与固有频率偏移的数值关系.有限元模拟结果证实当雷诺数小于1时,传感器的输入与输出呈现线性关系,其灵敏度为1.6 Hz/(cm·s-1).
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| 关 键 词： | 微机械电子系统 谐振式气体流量传感器 有限元模拟 流体-结构耦合 |
| 文章编号： | 1672-6030（2006）03-0245-03 |
| 收稿时间： | 2006-05-22 |
| 修稿时间： | 2006年5月22日 |
FEA Simulation of Resonant Low-Velocity Gas Flow Microsensor |
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| CHEN Jian,CHEN De-yong,WANG Jun-bo.FEA Simulation of Resonant Low-Velocity Gas Flow Microsensor[J].Nanotechnology and Precision Engineering,2006,4(3):245-247. |
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| Authors: | CHEN Jian CHEN De-yong WANG Jun-bo |
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| Abstract: | A novel resonant microsensor modeled on wind receptor of insects which can detect low velocity gas flow is demonstrated. To further evaluate this design, FEA simulation based on ANSYS is used. The relationship between Reynolds number and drag coefficient of infinite long beam which helps determine linear region of this microsensor is obtained numerically. Fluid-structural coupled analysis is conducted to find the relationship between velocity of gas flow and frequency shift of this microsensor. The result of FEA simulation shows that when Reynolds number is below 1, there exists linear relationship between input and output of this microsensor whose sensitivity is 1.6 Hz/(cm·s -1). |
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| Keywords: | MEMS resonant gas flow sensor FEA simulation fluidstructural coupling |
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