| 温度对半导体封装设备光学系统的影响 |
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| 引用本文： | 于丽娜,蒋云龙,田志.温度对半导体封装设备光学系统的影响[J].电子工业专用设备,2014(4):46-49. |
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| 作者姓名： | 于丽娜 蒋云龙 田志 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,100176 |
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| 摘 要： | 分析了半导体设备温度变化对其光学系统的影响,以某半导体设备光学系统为例阐述并指出了此影响对生产造成的危害。
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| 关 键 词： | 温度 半导体设备 光学系统 |
The Thermal Effect of the Optical System in Semiconductor Equipment |
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| YU Lina
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JIANG Yunlong
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TIAN Zhi.The Thermal Effect of the Optical System in Semiconductor Equipment[J].Equipment for Electronic Products Marufacturing,2014(4):46-49. |
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| Authors: | YU Lina JIANG Yunlong TIAN Zhi |
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| Affiliation: | (The 45th Research Institute of CETC, Beijing 100076, China) |
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| Abstract: | In this thesis,the effect of tem perature variation with sem iconductor equipm ent for optical system was analyzed. M eanwhile,interrelated exam ple of optical system in sem iconductor equipm ent was expatiated.A nd then,the induced dam age for m anufacture with itwas layout. |
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| Keywords: | Tem perature Sem iconductorequipm ent O pticalsystem |
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