| 透明导电ITO薄膜的制备及光电特性的研究 |
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| 引用本文： | 曹延军. 透明导电ITO薄膜的制备及光电特性的研究[J]. 新技术新工艺, 2011, 0(4): 74-76 |
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| 作者姓名： | 曹延军 |
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| 作者单位： | 延安职业技术学院,陕西,延安,716000 |
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| 摘 要： | 采用溶胶-凝胶方法以In（NO3）3.4·5H2O和SnCl4·5H2O为前驱物,用提拉法在石英玻璃基体上制备了ITO透明导电薄膜。详细研究了不同掺Sn比例、不同金属离子浓度、不同提拉速度、不同烘烤温度对ITO薄膜光电特性的影响。结果表明,提拉法制备的薄膜在热处理过程中由凝胶状态向结晶态逐渐转变,方电阻随热处理温度的升高而降低;导电率随薄膜厚度的增加呈非线性增加。
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| 关 键 词： | ITO薄膜 溶胶-凝胶法 光电特性 |
Research on Optical and Electrical Properties of Transparent Conductive ITO Films |
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| CAO Yanjun. Research on Optical and Electrical Properties of Transparent Conductive ITO Films[J]. New Technology & New Process, 2011, 0(4): 74-76 |
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| Authors: | CAO Yanjun |
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| Affiliation: | CAO Yanjun(Yan'an Vocational and Technical College,Yan'an 716000,China) |
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| Abstract: | Optical and electrical properties of ITO transparent conductive film were studied.ITO transparent conductive films were prepared on substrate of quartz glass by withdraw technique using sol-gel method.The effects of every factor on the optical and electrical properties of the files had been investigated during the process.The withdrawn ITO films crystallized during heat treatment and the crystallization process,ITO films decreased with the increase of temperature and the resistivity of the films came down w... |
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| Keywords: | ITO films Sol-gel method Optical and electrical properties |
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