| 先进光刻胶材料的研究进展 |
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| 引用本文： | 许箭,陈力,田凯军,胡睿,李沙瑜,王双青,杨国强.先进光刻胶材料的研究进展[J].感光科学与光化学,2011(6). |
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| 作者姓名： | 许箭 陈力 田凯军 胡睿 李沙瑜 王双青 杨国强 |
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| 作者单位： | 北京分子科学国家实验室中国科学院化学研究所光化学重点实验室; |
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| 基金项目： | 国家科技重大专项(02专项:2011ZX02701) |
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| 摘 要： | 本文简述了光刻技术及光刻胶的发展过程,并对应用于193纳米光刻和下一代EUV光刻的光刻胶材料的研究进展进行了综述,特别对文献中EUV光刻胶材料的研发进行了较为详细的介绍,以期对我国先进光刻胶的研发工作有所帮助.
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| 关 键 词： | 光刻胶 193nm光刻 EUV光刻 化学放大光刻胶 分子玻璃 |
Molecular Structure of Advanced Photoresists |
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| XU Jian,CHEN Li,TIAN Kai-jun,HU Rui,LI Sha-yu,WANG Shuang-qing,YANG Guo-qiang.Molecular Structure of Advanced Photoresists[J].Photographic Science and Photochemistry,2011(6). |
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| Authors: | XU Jian CHEN Li TIAN Kai-jun HU Rui LI Sha-yu WANG Shuang-qing YANG Guo-qiang |
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| Affiliation: | XU Jian,CHEN Li,TIAN Kai-jun,HU Rui,LI Sha-yu,WANG Shuang-qing,YANG Guo-qiang (Beijing National Laboratory for Molecular Sciences,Key laboratory of Photochemistry,Institute of Chemistry,Chinese Academy of Sciences,Beijing 100190,P.R.China) |
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| Abstract: | This article reviews the development of lithography technology and photoresists as well as their molecular structure for 193 nm and extreme ultravioletlithography(EUVL,the next generation lithography).Especially,we describe the recent research and development of EUV photoresists in detail for the purpose of being conducive to the domestic research on advanced photoresists. |
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| Keywords: | photoresists EUV lithography 193 nm lithography chemically amplified photoresists molecular glass |
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