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Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber |
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| Authors: | N. Zieyana Mohamed Annuar Mohd Faizul Mohd Sabri A. Shuhaimi Abu Bakar |
| Affiliation: | 1. Department of Mechanical Engineering, Faculty of Engineering, University of Malaya, 50603, Kuala Lumpur, Malaysia 2. Department of Physics, Faculty of Science, Low Dimensional Research Centre, University of Malaya, 50603, Kuala Lumpur, Malaysia |
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