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Design of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming devices |
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| Authors: | Xiuyuan Li Yulong Zhao Tengjiang Hu Wenju Xu You Zhao Yingwei Bai Wei Ren |
| Affiliation: | 1. State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, 710049, People’s Republic of China 2. Science and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physical Chemistry Research Institute, Xi’an, 710061, People’s Republic of China |
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