|
|||||
|
|
| 直流磁控溅射镀膜在玻璃涂层技术中的应用 | |
| 引用本文： | 侯鹤岚. 直流磁控溅射镀膜在玻璃涂层技术中的应用[J]. 真空, 2001, 0(1): 18-22 |
| 作者姓名： | 侯鹤岚 |
| 作者单位： | 营口高等职业专科学校, |
| 摘 要： | 本文在探讨镀膜玻璃一些基本问题的基础上，阐述了磁控溅射在玻璃涂层技术中的应用机理、靶的结构靶材的选取、提高膜层质量以及镀膜玻璃的应用及发展前景等问题。 |
| 关 键 词： | 镀膜玻璃 直流磁控溅射 玻璃涂层 镀膜技术 |
| 文章编号： | 1002-0322(2001)01-0018-05 |
| 修稿时间： | 2000-11-12 |
Application of DC Magnetron Sputtering Coating in the Glass Coating Technique |
|
| HOU He-lan. Application of DC Magnetron Sputtering Coating in the Glass Coating Technique[J]. Vacuum(China), 2001, 0(1): 18-22 | |
| Authors: | HOU He-lan |
| Abstract: | On the basis of some principle trouble of coating glass, the application principle of magnetron sputtering, selection of target material are introduced, enhancement of the coating quality, application of the coated glass and development prospect are also given in this paper. |
| Keywords: | magnetron sputtering coated glass coating |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |