| MEMS热风速计流固耦合模拟 |
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| 引用本文： | 张骅, 沈广平, 吴剑, 秦明, 黄庆安,.MEMS热风速计流固耦合模拟[J].电子器件,2007,30(6):2247-2249. |
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| 作者姓名： | 张骅 沈广平 吴剑 秦明 黄庆安 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,南京,210096 |
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| 基金项目： | 国家自然科学基金
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江苏省青蓝工程人才培养计划资助课题 |
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| 摘 要： | 通过设置流-固耦合面和固-固耦合面,采用ANSYS软件对MEMS热风速计进行了有限元模拟,基本解决了热风速计有限元模拟中遇到的多物理场耦合问题.通过对不同风速,不同风向情况下的风速计芯片的热分布进行了模拟和分析,得到了一些有助于芯片设计的结论.最后,为了验证模型的正确性,进行了实验测量.实验数据与模拟结果基本相符,误差在8%以内.
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| 关 键 词： | 流固耦合 MEMS 热风速计 模拟 测量 |
| 文章编号： | 1005-9490(2007)06-2247-03 |
| 修稿时间： | 2007年1月5日 |
Fluid-Solid Coupling Simulation of MEMS Thermal Wind Sensor |
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| ZHANG Hu,SHEN Guang-ping,WU Jian,QIN Ming,HUANG Qing-an.Fluid-Solid Coupling Simulation of MEMS Thermal Wind Sensor[J].Journal of Electron Devices,2007,30(6):2247-2249. |
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| Authors: | ZHANG Hu SHEN Guang-ping WU Jian QIN Ming HUANG Qing-an |
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| Affiliation: | Key Laboratory of MEMS of Ministry of Education; Southeast University; Nanjing 210096; China |
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| Abstract: | The article solves the multi-physical fields coupling problem during the finite-element simulation of thermal wind sensors by means of setting the fluid-solid coupling surfaces and the solid-solid coupling surfaces when applying ANSYS software to the finite-element simulation of MEMS thermal wind sensor.The simulation and analysis of the heat distribution of the chip with different wind speed and its angle could find out some conclusions benefit for the chip design.Furthermore,the experimental measurement is adopted in the purpose of verifying the model correct.The result indicates that the experimental data matches the simulant one well,and the error between them is within 8%. |
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| Keywords: | fluid-solid coupling MEMS thermal wind sensor simulation measurement |
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