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UV nanoimprint using flexible polymer template and substrate |
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| Authors: | Sung-Hoon Hong Heon Lee Hee-Chul Lee |
| Affiliation: | a Department of Materials Science and Engineering, Korea University, Anam-dong 5Ka-1, SungbuK-Ku, Seoul 136-713, Republic of Korea b Department of Advanced Materials Engineering, Korea Polytechnic University, Kyungkido 429-723, Republic of Korea c Korea Institute of Nuclear Safety, Taejeon 305-600, Republic of Korea |
| Abstract: | Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate. |
| Keywords: | UV nanoimprint lithography Hot embossing DLC coating Flexible polymer template |
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