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电极激励超声谐振谱压电材料定征技术
引用本文:曾照丰,吴校生,黄山,熊越夫,赵俊军,冯其云.电极激励超声谐振谱压电材料定征技术[J].压电与声光,2021,43(3):421-425.
作者姓名:曾照丰  吴校生  黄山  熊越夫  赵俊军  冯其云
作者单位:(上海交通大学 微米/纳米加工技术国家级重点实验室,上海 200240)
基金项目:上海市科委平台建设基金资助项目(19DZ2291103)
摘    要:超声谐振谱(RUS)是一种压电材料单样品定征技术,避免了多样品造成的结果不自洽问题。现有的谐振谱激励方法常使用超声换能器定点激励 拾取,需要有复杂的测试装置。该文提出了一种电极激励 拾取法来获取压电谐振器的超声谐振谱,该方法测试装置简单,同时还可获得模态振型的对称特性,避免了反演过程中峰丢〖JP2〗失和错峰拟合。基于现场可编程门阵列(FPGA)技术搭建了压电谐振器分组扫频激励电路,通过电荷放大器拾取谐振峰。结果表明,通过Levenberg Marquardt算法可完成测试频谱和计算频谱的匹配,成功获得了优化后压电材料参数。

关 键 词:超声谐振谱(RUS)  压电材料  定征  电极激励  Levenberg  Marquardt算法

Piezoelectric Material Characterization Technology Based on RUS with Electrode Excitation
ZENG Zhaofeng,WU Xiaosheng,HUANG Shan,XIONG Yuefu,ZHAO Junjun,FENG Qiyun.Piezoelectric Material Characterization Technology Based on RUS with Electrode Excitation[J].Piezoelectrics & Acoustooptics,2021,43(3):421-425.
Authors:ZENG Zhaofeng  WU Xiaosheng  HUANG Shan  XIONG Yuefu  ZHAO Junjun  FENG Qiyun
Affiliation:(National Key Laboratory of Scienceand Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiaotong University, Shanghai 200240, China)
Abstract:The resonant ultrasonic spectroscopy(RUS) is a single sample characterization technique for piezoelectric materials, which can avoid the self inconsistency problem caused by multiple samples. The existing resonance spectrum excitation methods often use the ultrasonic transducer to excite and pick up at a fixed point, which requires complex test equipment. In this paper, an electrode excitation pick up method is proposed to obtain the ultrasonic resonance spectrum of piezoelectric resonators. The test equipment is simple in structure and the symmetry of the vibration mode can be obtained to avoid peak missing and peak mismatch fitting in the inversion process. The field programmable gate array(FPGA) technology is used to build a piezoelectric resonator grouping frequency sweep excitation circuit, and the resonance peaks are picked up through a charge amplifier. The results show that the test spectrum and the calculated spectrum can be matched by Levenberg Marquardt algorithm, and the optimized piezoelectric material parameters are obtained successfully.
Keywords:resonant ultrasonic spectroscopy(RUS)  piezoelectric material  characterization  electrode excitation  Levenberg Marquardt algorithm
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